Reflecting the rapid growth of the MEMS field and the commitment and success of its research community, the IEEE MEMS Conference series has evolved into a premier annual event in the MEMS area. In recent years it has attracted over 600 participants and has presented more than 200 select papers in non-overlapping oral and poster sessions. The 22nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2009) will be held in Sorrento, Italy, from 25 - 29 January 2009. The major areas of activity in the development of MEMS solicited and expected at this conference include but are not limited to:

* Design, simulation and analysis tools with experimental verification
* Fabrication technologies and processes
* Silicon and non-silicon materials
* Electro-mechanical integration techniques
* Assembly and packaging approaches
* Metrology and operational evaluation techniques
* System architecture

The major areas of activity in the application of MEMS solicited and expected at this conference include but are not limited to:

* Mechanical, thermal, and magnetic sensors and actuators, and system
* Opto-mechanical microdevices and microsystems
* Fluidic microcomponents and microsystems
* Microdevices for data storage
* Microdevices for biomedical engineering
* Micro chemical analysis systems
* Microdevices and systems for wireless communication
* Microdevices for power supply and energy harvesting
* Nano-electro-mechanical devices and systems
* Scientific microinstruments

Abstract Submission Deadline:
24 August 2008

Notice of Acceptance:
26 September 2008

Final Camera Ready Due:
21 October 2008

Early Bird Registration Deadline:
30 September 2008